Semiconductor Industry Applications

Smart Sensors

Heating Elements

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Resistance monitoring to prevent wafer scrap and reduce equipment downtime

Vacuum Pumps

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Vibration monitoring to prevent wafer scrap and reduce rebuild costs

Turbo Pumps

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Vibration monitoring to prevent wafer scrap and process tool damage as well as reduce rebuild costs

Boat Rotation Units

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Vibration monitoring of ferrofluid seal, motor and mechanical linkage to prevent particle contamination and wafer scrap 

DC Power Supplies

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Voltage monitoring of power supplies to reduce wafer scrap and equipment downtime

Chemical Mechanical Planarization

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 Vibration monitoring of polishing heads, tables, conditioning arms, spin rinse dryers and brush boxes to prevent wafer breakage and unscheduled downtime 

Wafer Scratch and Impact

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Vibration monitoring to detect misalignment of the automation resulting in wafer scratching or breakage

Wafer Transfer Robots

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Vibration monitoring to detect component degradation and calibraton drift of the robot to prevent wafer scrap and equipment downtime

Mass Flow Controllers

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Gas flow monitoring to ensure MFC integrity to reduce wafer scrap and process drift

Boat Loaders and Elevators

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Current and vibration monitoring of step motors to prevent particles and equipment downtime

Exhaust Line Obstructions

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Pressure monitoring of exhaust draw to detect clogging in the lines or  abatement system to prevent wafer scrap and equipment downtime

Cabinet Exhausts

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Vibration monitoring of bearings and motors of the exhaust to prevent cabinet overheating, process drift and wafer scrap

Halogen Lamps

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Resistance and light intensity monitoring to process uniformity variation and wafer scrap

Heater Blocks

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 Resistance monitoring to prevent wafer scrap and reduce equipment downtime 

Spin Rise Dryers

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Vibration monitoring to detect rotational imbalance due to ferrofluid seal, bearing, motor, missing cassettes or rotor degradation 

Equipment Control Systems

Model Based Temperature Control (MBTC)

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Diffusion furnace controller retrofit to improve process capability and eliminate profiling 

Heating Element Life Optimization Controller

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Optimization of the existing temperature control system power application to improve heater life

Run-to-Run Process Control

Barometric Pressure

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Automated adjustment of process recipe parameters of atmospheric processes to compensate for barometric pressure disturbances to improve run-to-run uniformity

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