Semiconductor Industry Applications

Smart Sensors

Heating Elements

Resistance monitoring to prevent wafer scrap and reduce equipment downtime

Vacuum Pumps

Vibration monitoring to prevent wafer scrap and reduce rebuild costs

Turbo Pumps

Vibration monitoring to prevent wafer scrap and process tool damage as well as reduce rebuild costs

Boat Rotation Units

Vibration monitoring of ferrofluid seal, motor and mechanical linkage to prevent particle contamination and wafer scrap 

DC Power Supplies

Voltage monitoring of power supplies to reduce wafer scrap and equipment downtime

Chemical Mechanical Planarization

 Vibration monitoring of polishing heads, tables, conditioning arms, spin rinse dryers and brush boxes to prevent wafer breakage and unscheduled downtime 

Wafer Scratch and Impact

Vibration monitoring to detect misalignment of the automation resulting in wafer scratching or breakage

Wafer Transfer Robots

Vibration monitoring to detect component degradation and calibraton drift of the robot to prevent wafer scrap and equipment downtime

Mass Flow Controllers

Gas flow monitoring to ensure MFC integrity to reduce wafer scrap and process drift

Boat Loaders and Elevators

Current and vibration monitoring of step motors to prevent particles and equipment downtime

Exhaust Line Obstructions

Pressure monitoring of exhaust draw to detect clogging in the lines or  abatement system to prevent wafer scrap and equipment downtime

Cabinet Exhausts

Vibration monitoring of bearings and motors of the exhaust to prevent cabinet overheating, process drift and wafer scrap

Halogen Lamps

Resistance and light intensity monitoring to process uniformity variation and wafer scrap

Heater Blocks

 Resistance monitoring to prevent wafer scrap and reduce equipment downtime 

Spin Rise Dryers

Vibration monitoring to detect rotational imbalance due to ferrofluid seal, bearing, motor, missing cassettes or rotor degradation 

Equipment Control Systems

Model Based Temperature Control (MBTC)

Diffusion furnace controller retrofit to improve process capability and eliminate profiling 

Heating Element Life Optimization Controller

Optimization of the existing temperature control system power application to improve heater life

Run-to-Run Process Control

Barometric Pressure

Automated adjustment of process recipe parameters of atmospheric processes to compensate for barometric pressure disturbances to improve run-to-run uniformity

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